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Morphology and preferred orientation of titanium nitride plates prepared by chemical vapour deposition

Jiang, C. / Goto, T. / Hirai, T.

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Morphology and preferred orientation of titanium nitride plates prepared by chemical vapour deposition

Jiang, C. / Goto, T. / Hirai, T.

Morphology and preferred orientation of titanium nitride plates prepared by chemical vapour deposition

Jiang, C. / Goto, T. / Hirai, T.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Morphology and preferred orientation of titanium nitride plates prepared by chemical vapour deposition

Contributors:

Jiang, C. (author) / Goto, T. (author) / Hirai, T. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 29 ; 669

Publication date:

1994-01-01

Size:

669 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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