Terrace growth and polytype development in epitaxial �-SiC films on �-SiC (6H and 15R) substrates: Fid-Bau Portal

Terrace growth and polytype development in epitaxial -SiC films on -SiC (6H and 15R) substrates

Chien, F. R. / Nutt, S. R. / Yoo, W. S. / Kimoto, T.

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Terrace growth and polytype development in epitaxial -SiC films on -SiC (6H and 15R) substrates

Chien, F. R. / Nutt, S. R. / Yoo, W. S. / Kimoto, T.

Terrace growth and polytype development in epitaxial -SiC films on -SiC (6H and 15R) substrates

Chien, F. R. / Nutt, S. R. / Yoo, W. S. / Kimoto, T.

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Check availability in my library

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Document information

Title:

Terrace growth and polytype development in epitaxial -SiC films on -SiC (6H and 15R) substrates

Contributors:

Chien, F. R. (author) / Nutt, S. R. (author) / Yoo, W. S. (author) / Kimoto, T. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 9 ; 940

Publication date:

1994-01-01

Size:

940 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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