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Amorphous or nanocrystalline AlN thin films formed from AlN : H

Wang, X.-D. / Hipps, K. W. / Dickinson, J. T. / Mazur, U.

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Amorphous or nanocrystalline AlN thin films formed from AlN : H

Wang, X.-D. / Hipps, K. W. / Dickinson, J. T. / Mazur, U.

Amorphous or nanocrystalline AlN thin films formed from AlN : H

Wang, X.-D. / Hipps, K. W. / Dickinson, J. T. / Mazur, U.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Amorphous or nanocrystalline AlN thin films formed from AlN : H

Contributors:

Wang, X.-D. (author) / Hipps, K. W. (author) / Dickinson, J. T. (author) / Mazur, U. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 9 ; 1449

Publication date:

1994-01-01

Size:

1449 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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