Tungsten thin film deposition by 5 �m multiphoton dissociation of W(CO)~6: Fid-Bau Portal

Tungsten thin film deposition by 5 m multiphoton dissociation of W(CO)~6

Diaz, L. / Gonzalez-Diaz, P. F. / Santos, M. / Sigueenza, C.

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Tungsten thin film deposition by 5 m multiphoton dissociation of W(CO)~6

Diaz, L. / Gonzalez-Diaz, P. F. / Santos, M. / Sigueenza, C.

Tungsten thin film deposition by 5 m multiphoton dissociation of W(CO)~6

Diaz, L. / Gonzalez-Diaz, P. F. / Santos, M. / Sigueenza, C.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Tungsten thin film deposition by 5 m multiphoton dissociation of W(CO)~6

Contributors:

Diaz, L. (author) / Gonzalez-Diaz, P. F. (author) / Santos, M. (author) / Sigueenza, C. (author)

Published in:

SURFACE ENGINEERING -LONDON- ; 10 ; 230

Publication date:

1994-01-01

Size:

230 pages

ISSN:

0267-0844

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.44

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