On the determination and control of flats location in liquid-encapsulated Czochralski grown InP wafers: Fid-Bau Portal

On the determination and control of flats location in liquid-encapsulated Czochralski grown InP wafers

Favaretto, M. / Guadalupi, G. M. / Meregalli, L. / Molinas, B.

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On the determination and control of flats location in liquid-encapsulated Czochralski grown InP wafers

Favaretto, M. / Guadalupi, G. M. / Meregalli, L. / Molinas, B.

On the determination and control of flats location in liquid-encapsulated Czochralski grown InP wafers

Favaretto, M. / Guadalupi, G. M. / Meregalli, L. / Molinas, B.

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Check availability in my library

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Document information

Title:

On the determination and control of flats location in liquid-encapsulated Czochralski grown InP wafers

Contributors:

Favaretto, M. (author) / Guadalupi, G. M. (author) / Meregalli, L. (author) / Molinas, B. (author) / Fornari, R.

Published in:

2nd International Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies ; 80

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 28

Publication date:

1994-01-01

Size:

80 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

Fogliani, S. / Masi, M. / Carra, S. et al. | British Library Online Contents | 1994

Thermal stresses and dislocation formation in liquid-encapsulated Czochralski-grown InP crystals

Fogliani, S. / Masi, M. / Carra, S. et al. | British Library Online Contents | 1994

Growth and characterization of III-V materials grown by vapor-pressure-controlled Czochralski method: comparison with standard liquid-encapsulated Czochralski materials

Tatsuno, M. / Hosokawa, Y. / Iwasaki, T. et al. | British Library Online Contents | 1994

Comparison of high temperature annealed Czochralski silicon wafers and epitaxial wafers

Graef, D. / Lambert, U. / Brohl, M. et al. | British Library Online Contents | 1996

Investigations of structural defects by etching of GaSb grown by the liquid-encapsulated Czochralski technique

Costa, E. M. / Dedavid, B. A. / Mueller, A. | British Library Online Contents | 1997