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    Control of the etching reaction of digital etching using tunable UV laser irradiation

    New search for: Meguro, T.
    New search for: Ishii, M.
    New search for: Sugano, T.
    New search for: Gamo, K.

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    Control of the etching reaction of digital etching using tunable UV laser irradiation

    New search for: Meguro, T.
    New search for: Ishii, M.
    New search for: Sugano, T.
    New search for: Gamo, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Control of the etching reaction of digital etching using tunable UV laser irradiation

    New search for: Meguro, T.
    New search for: Ishii, M.
    New search for: Sugano, T.
    New search for: Gamo, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Control of the etching reaction of digital etching using tunable UV laser irradiation

    Contributors:

    Meguro, T. (author) / Ishii, M. (author) / Sugano, T. (author) / Gamo, K. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 82/83 ; 193

    Publication date:

    1994-01-01

    Size:

    193 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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