Surface reaction control in digital etching of GaAs by using a tunable UV laser system: reaction control mechanism in layer-by-layer etching

Ishii, M. / Meguro, T. / Sugano, T. et al. | British Library Online Contents | 1995

Tunable UV laser induced digital etching of GaAs: wavelength dependence of etch rate and surface processes

Meguro, T. / Sakai, K. / Yamamoto, Y. et al. | British Library Online Contents | 1996

Selective dry etching using inductively coupled plasmas - Part I. GaAs/AlGaAs and GaAs/InGaP

Hays, D.C. / Cho, H. / Jung, K.B. et al. | British Library Online Contents | 1999

Digital etching by using a laser beam: on the control of digital etching products

Ishii, M. / Meguro, T. / Sugano, T. et al. | British Library Online Contents | 1994

Parametric investigations and simulations of ion beam etching and reactive ion etching mechanisms for GaAs compounds

Ketata, K. / Koumetz, S. / Latry, O. et al. | British Library Online Contents | 1994