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X-ray photoelectron spectroscopic and atomic force microscopic study of GaAs etching with a HCl solution
X-ray photoelectron spectroscopic and atomic force microscopic study of GaAs etching with a HCl solution
X-ray photoelectron spectroscopic and atomic force microscopic study of GaAs etching with a HCl solution
Song, Z. (author) / Shogen, S. (author) / Kawasaki, M. (author) / Suemune, I. (author)
APPLIED SURFACE SCIENCE ; 82/83 ; 250
1994-01-01
250 pages
Article (Journal)
Unknown
DDC:
621.35
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