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    Particle generation and film formation in an atmospheric-pressure chemical vapour deposition process using tetraethylorthosilicate

    New search for: Adachi, M.
    New search for: Okuyama, K.
    New search for: Tohge, N.

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    Particle generation and film formation in an atmospheric-pressure chemical vapour deposition process using tetraethylorthosilicate

    New search for: Adachi, M.
    New search for: Okuyama, K.
    New search for: Tohge, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Particle generation and film formation in an atmospheric-pressure chemical vapour deposition process using tetraethylorthosilicate

    New search for: Adachi, M.
    New search for: Okuyama, K.
    New search for: Tohge, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Particle generation and film formation in an atmospheric-pressure chemical vapour deposition process using tetraethylorthosilicate

    Contributors:

    Adachi, M. (author) / Okuyama, K. (author) / Tohge, N. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE ; 30 ; 932

    Publication date:

    1995-01-01

    Size:

    932 pages

    ISSN:

    0022-2461

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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