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Thermodynamic analysis of chemical vapour deposition from methoxysilanes
Thermodynamic analysis of chemical vapour deposition from methoxysilanes
Thermodynamic analysis of chemical vapour deposition from methoxysilanes
Skaf, D. W. (author) / Burns, K. E. (author)
JOURNAL OF MATERIALS SCIENCE ; 30 ; 2895
1995-01-01
2895 pages
Article (Journal)
Unknown
DDC:
620.11
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