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Characterisation of semi-insulating polysilicon oxygen doped silicon thin films

Lynch, S. / Greef, R. / Stoemenos, J. / Dartnell, N. J.

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Characterisation of semi-insulating polysilicon oxygen doped silicon thin films

Lynch, S. / Greef, R. / Stoemenos, J. / Dartnell, N. J.

Characterisation of semi-insulating polysilicon oxygen doped silicon thin films

Lynch, S. / Greef, R. / Stoemenos, J. / Dartnell, N. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Characterisation of semi-insulating polysilicon oxygen doped silicon thin films

Contributors:

Lynch, S. (author) / Greef, R. (author) / Stoemenos, J. (author) / Dartnell, N. J. (author)

Published in:

MATERIALS SCIENCE AND TECHNOLOGY -LONDON- ; 11 ; 80

Publication date:

1995-01-01

Size:

80 pages

ISSN:

0267-0836

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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