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Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems
Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems
Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems
Bhushan, B. (author) / Li, X. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 12 ; 54-63
1997-01-01
10 pages
Article (Journal)
English
DDC:
620.11
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