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The effect of carbon on diffusion in silicon
The effect of carbon on diffusion in silicon
The effect of carbon on diffusion in silicon
Stolk, P. A. (author) / Gossmann, H.-J. (author) / Eaglesham, D. J. (author) / Poate, J. M. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 36 ; 275-281
1996-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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