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    Influence of the composition of gas mixture on the stoichiometry of sputter-deposited compound films: The case of zirconium nitrides

    New search for: Wautelet, M.
    New search for: Dauchot, J. P.
    New search for: Debal, F.
    New search for: Edart, S.
    New search for: Hecq, M.

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    Influence of the composition of gas mixture on the stoichiometry of sputter-deposited compound films: The case of zirconium nitrides

    New search for: Wautelet, M.
    New search for: Dauchot, J. P.
    New search for: Debal, F.
    New search for: Edart, S.
    New search for: Hecq, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of the composition of gas mixture on the stoichiometry of sputter-deposited compound films: The case of zirconium nitrides

    New search for: Wautelet, M.
    New search for: Dauchot, J. P.
    New search for: Debal, F.
    New search for: Edart, S.
    New search for: Hecq, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Influence of the composition of gas mixture on the stoichiometry of sputter-deposited compound films: The case of zirconium nitrides

    Contributors:

    Wautelet, M. (author) / Dauchot, J. P. (author) / Debal, F. (author) / Edart, S. (author) / Hecq, M. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 825-829

    Publication date:

    1996-01-01

    Size:

    5 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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