Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
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Influence of the composition of gas mixture on the stoichiometry of sputter-deposited compound films: The case of zirconium nitrides
Influence of the composition of gas mixture on the stoichiometry of sputter-deposited compound films: The case of zirconium nitrides
Influence of the composition of gas mixture on the stoichiometry of sputter-deposited compound films: The case of zirconium nitrides
Wautelet, M. (Autor:in) / Dauchot, J. P. (Autor:in) / Debal, F. (Autor:in) / Edart, S. (Autor:in) / Hecq, M. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 825-829
01.01.1996
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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