Very low temperature polycrystalline silicon films with very large grains deposited for thin film transistor applications: Fid-Bau Portal

Very low temperature polycrystalline silicon films with very large grains deposited for thin film transistor applications

Wang, K. C. / Yew, T. R. / Hwang, H. L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Very low temperature polycrystalline silicon films with very large grains deposited for thin film transistor applications

Wang, K. C. / Yew, T. R. / Hwang, H. L.

Very low temperature polycrystalline silicon films with very large grains deposited for thin film transistor applications

Wang, K. C. / Yew, T. R. / Hwang, H. L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Very low temperature polycrystalline silicon films with very large grains deposited for thin film transistor applications

Contributors:

Wang, K. C. (author) / Yew, T. R. (author) / Hwang, H. L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 92 ; 99-105

Publication date:

1996-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Uchikoga, S. | British Library Online Contents | 2002

Optical absorption coefficient of polycrystalline silicon with very high oxygen content

Serra, J. M. / Gamboa, R. / Vallera, A. M. | British Library Online Contents | 1996

Structure of microcrystalline silicon films deposited at very low temperatures by hot-wire CVD

Peiro, D. / Bertomeu, J. / Voz, C. et al. | British Library Online Contents | 2000

Optimisation of doped microcrystalline silicon films deposited at very low temperatures by hot-wire CVD

Voz, C. / Peiro, D. / Bertomeu, J. et al. | British Library Online Contents | 2000

Elasticity study of very thin Cu films

Fujiwara, K. / Tanimoto, H. / Mizubayashi, H. | British Library Online Contents | 2006