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Mirror polishing of InP wafer surfaces with NaOCl-citric acid

Morisawa, Y. / Kikuma, I. / Takayama, N. / Takeuchi, M.

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Mirror polishing of InP wafer surfaces with NaOCl-citric acid

Morisawa, Y. / Kikuma, I. / Takayama, N. / Takeuchi, M.

Mirror polishing of InP wafer surfaces with NaOCl-citric acid

Morisawa, Y. / Kikuma, I. / Takayama, N. / Takeuchi, M.

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Access via TIB

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Order at Subito €

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Document information

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Document information

Title:

Mirror polishing of InP wafer surfaces with NaOCl-citric acid

Contributors:

Morisawa, Y. (author) / Kikuma, I. (author) / Takayama, N. (author) / Takeuchi, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 92 ; 147-150

Publication date:

1996-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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