Magnetic Field in a Commercial Sputter Magnetron: Fid-Bau Portal

Magnetic Field in a Commercial Sputter Magnetron

Murphy, M. J. / Monaghan, J. / Cameron, D. C. / Hashmi, M. S. J.

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Magnetic Field in a Commercial Sputter Magnetron

Murphy, M. J. / Monaghan, J. / Cameron, D. C. / Hashmi, M. S. J.

Magnetic Field in a Commercial Sputter Magnetron

Murphy, M. J. / Monaghan, J. / Cameron, D. C. / Hashmi, M. S. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Magnetic Field in a Commercial Sputter Magnetron

Contributors:

Murphy, M. J. (author) / Monaghan, J. (author) / Cameron, D. C. (author) / Hashmi, M. S. J. (author)

Published in:

KEY ENGINEERING MATERIALS ; 287-294

Publication date:

1996-01-01

Size:

8 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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