Passivation of dopants in InGaP using ECR hydrogenation: Fid-Bau Portal

Passivation of dopants in InGaP using ECR hydrogenation

Lee, J. W. / Pearton, S. J. / Abernathy, C. R. / Hobson, W. S. / Ren, F.

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Passivation of dopants in InGaP using ECR hydrogenation

Lee, J. W. / Pearton, S. J. / Abernathy, C. R. / Hobson, W. S. / Ren, F.

Passivation of dopants in InGaP using ECR hydrogenation

Lee, J. W. / Pearton, S. J. / Abernathy, C. R. / Hobson, W. S. / Ren, F.

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Document information

Title:

Passivation of dopants in InGaP using ECR hydrogenation

Contributors:

Lee, J. W. (author) / Pearton, S. J. (author) / Abernathy, C. R. (author) / Hobson, W. S. (author) / Ren, F. (author) / Balkanski, M. / Kamimura, H. / Mahajan, S.

Published in:

Solid-State Materials for Advaced Technology ; 263-266

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 38

Publication date:

1996-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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