PE-MOCVD of Dielectric Thin Films: Challenges and Opportunities: Fid-Bau Portal

PE-MOCVD of Dielectric Thin Films: Challenges and Opportunities

Dey, S. K. / Alluri, P. V.

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PE-MOCVD of Dielectric Thin Films: Challenges and Opportunities

Dey, S. K. / Alluri, P. V.

PE-MOCVD of Dielectric Thin Films: Challenges and Opportunities

Dey, S. K. / Alluri, P. V.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

PE-MOCVD of Dielectric Thin Films: Challenges and Opportunities

Contributors:

Dey, S. K. (author) / Alluri, P. V. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 21 ; 44-48

Publication date:

1996-01-01

Size:

5 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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