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    Low pressure MOCVD of TiN thin films

    New search for: Kim, S. W.
    New search for: Jimba, H.
    New search for: Sekiguchi, A.
    New search for: Okada, O.
    New search for: Hosokawa, N.

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    Low pressure MOCVD of TiN thin films

    New search for: Kim, S. W.
    New search for: Jimba, H.
    New search for: Sekiguchi, A.
    New search for: Okada, O.
    New search for: Hosokawa, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Low pressure MOCVD of TiN thin films

    New search for: Kim, S. W.
    New search for: Jimba, H.
    New search for: Sekiguchi, A.
    New search for: Okada, O.
    New search for: Hosokawa, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Low pressure MOCVD of TiN thin films

    Contributors:

    Kim, S. W. (author) / Jimba, H. (author) / Sekiguchi, A. (author) / Okada, O. (author) / Hosokawa, N. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 99 ; 546-550

    Publication date:

    1996-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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