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Carbon nitride films prepared by ion implantation

Gu, Y. S. / Pan, L. Q. / Chang, X. R. / Tian, Z. Z.

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Carbon nitride films prepared by ion implantation

Gu, Y. S. / Pan, L. Q. / Chang, X. R. / Tian, Z. Z.

Carbon nitride films prepared by ion implantation

Gu, Y. S. / Pan, L. Q. / Chang, X. R. / Tian, Z. Z.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Carbon nitride films prepared by ion implantation

Contributors:

Gu, Y. S. (author) / Pan, L. Q. (author) / Chang, X. R. (author) / Tian, Z. Z. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 15 ; 1355-1357

Publication date:

1996-01-01

Size:

3 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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