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Chemical Modification of Titanium Nitride Films via Ion Implantation

Aizawa, T. / Mitsuo, A. / Akhadejdamrong, T.

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Chemical Modification of Titanium Nitride Films via Ion Implantation

Aizawa, T. / Mitsuo, A. / Akhadejdamrong, T.

Chemical Modification of Titanium Nitride Films via Ion Implantation

Aizawa, T. / Mitsuo, A. / Akhadejdamrong, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Chemical Modification of Titanium Nitride Films via Ion Implantation

Contributors:

Aizawa, T. (author) / Mitsuo, A. (author) / Akhadejdamrong, T. (author)

Published in:

MATERIALS TRANSACTIONS ; 44 ; 1962-1970

Publication date:

2003-01-01

Size:

9 pages

ISSN:

1345-9678

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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