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Charging phenomenon of insulators in negative-ion implantation
Charging phenomenon of insulators in negative-ion implantation
Charging phenomenon of insulators in negative-ion implantation
Toyota, Y. (author) / Tsuji, H. (author) / Nagumo, S. (author) / Gotoh, Y. (author) / Ishikawa, J. (author)
APPLIED SURFACE SCIENCE ; 99 ; 360-364
1996-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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Charging phenomenon of insulators in negative-ion implantation
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