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    Selective deposition of tungsten on ITM-CoSi~2

    New search for: Kaehler, J. D.
    New search for: Depta, D.
    New search for: Ferretti, R.
    New search for: Gessner, T.
    New search for: Schulz, S. E.

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    Selective deposition of tungsten on ITM-CoSi~2

    New search for: Kaehler, J. D.
    New search for: Depta, D.
    New search for: Ferretti, R.
    New search for: Gessner, T.
    New search for: Schulz, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Selective deposition of tungsten on ITM-CoSi~2

    New search for: Kaehler, J. D.
    New search for: Depta, D.
    New search for: Ferretti, R.
    New search for: Gessner, T.
    New search for: Schulz, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Selective deposition of tungsten on ITM-CoSi~2

    Contributors:

    Kaehler, J. D. (author) / Depta, D. (author) / Ferretti, R. (author) / Gessner, T. / Schulz, S. E.

    Published in:

    Materials for Advanced Metallization ; 339-341

    APPLIED SURFACE SCIENCE ; 91

    Publication date:

    1996-01-01

    Size:

    3 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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