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Investigation of the silicon-plasma silicon nitride interface with in situ transient photoconductivity measurements
Investigation of the silicon-plasma silicon nitride interface with in situ transient photoconductivity measurements
Investigation of the silicon-plasma silicon nitride interface with in situ transient photoconductivity measurements
Elmiger, J. R. (author) / Kunst, M. (author)
APPLIED SURFACE SCIENCE ; 103 ; 11-18
1996-01-01
8 pages
Article (Journal)
English
DDC:
621.35
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