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Investigation of the silicon-plasma silicon nitride interface with in situ transient photoconductivity measurements
Investigation of the silicon-plasma silicon nitride interface with in situ transient photoconductivity measurements
Investigation of the silicon-plasma silicon nitride interface with in situ transient photoconductivity measurements
Elmiger, J. R. (Autor:in) / Kunst, M. (Autor:in)
APPLIED SURFACE SCIENCE ; 103 ; 11-18
01.01.1996
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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