Atomic force microscopy of laser induced sub-micrometer periodic structures on implanted fused silica and silicon: Fid-Bau Portal

Atomic force microscopy of laser induced sub-micrometer periodic structures on implanted fused silica and silicon

Bukharaev, A. A. / Janduganov, V. M. / Samarsky, E. A. / Berdunov, N. V.

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Atomic force microscopy of laser induced sub-micrometer periodic structures on implanted fused silica and silicon

Bukharaev, A. A. / Janduganov, V. M. / Samarsky, E. A. / Berdunov, N. V.

Atomic force microscopy of laser induced sub-micrometer periodic structures on implanted fused silica and silicon

Bukharaev, A. A. / Janduganov, V. M. / Samarsky, E. A. / Berdunov, N. V.

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Check availability in my library

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Document information

Title:

Atomic force microscopy of laser induced sub-micrometer periodic structures on implanted fused silica and silicon

Contributors:

Bukharaev, A. A. (author) / Janduganov, V. M. (author) / Samarsky, E. A. (author) / Berdunov, N. V. (author)

Published in:

APPLIED SURFACE SCIENCE ; 103 ; 49-54

Publication date:

1996-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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