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Characterization of hard amorphous carbon films deposited with high-energy ion beams

Pregliasco, R. G. / Zampieri, G. / Huck, H. / Halac, E. B. / De Benyacar, M. A. R. / Righini, R.

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Characterization of hard amorphous carbon films deposited with high-energy ion beams

Pregliasco, R. G. / Zampieri, G. / Huck, H. / Halac, E. B. / De Benyacar, M. A. R. / Righini, R.

Characterization of hard amorphous carbon films deposited with high-energy ion beams

Pregliasco, R. G. / Zampieri, G. / Huck, H. / Halac, E. B. / De Benyacar, M. A. R. / Righini, R.

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Document information

Title:

Characterization of hard amorphous carbon films deposited with high-energy ion beams

Contributors:

Pregliasco, R. G. (author) / Zampieri, G. (author) / Huck, H. (author) / Halac, E. B. (author) / De Benyacar, M. A. R. (author) / Righini, R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 103 ; 261-267

Publication date:

1996-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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