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    Characterization of crystallographic defects in thermally oxidized SIMOX materials

    New search for: Giles, L. F.
    New search for: Kunii, Y.
    New search for: Itoh, M.
    New search for: Kawazoe, H.
    New search for: Yamauchi, H.
    New search for: Koinuma, H.

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    Characterization of crystallographic defects in thermally oxidized SIMOX materials

    New search for: Giles, L. F.
    New search for: Kunii, Y.
    New search for: Itoh, M.
    New search for: Kawazoe, H.
    New search for: Yamauchi, H.
    New search for: Koinuma, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of crystallographic defects in thermally oxidized SIMOX materials

    New search for: Giles, L. F.
    New search for: Kunii, Y.
    New search for: Itoh, M.
    New search for: Kawazoe, H.
    New search for: Yamauchi, H.
    New search for: Koinuma, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Characterization of crystallographic defects in thermally oxidized SIMOX materials

    Contributors:

    Giles, L. F. (author) / Kunii, Y. (author) / Itoh, M. / Kawazoe, H. / Yamauchi, H. / Koinuma, H.

    Published in:

    Oxide Electronics ; 182-185

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 41

    Publication date:

    1996-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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