Photoluminescence Study on Point Defects in SIMOX Buried SiO~2 Film: Fid-Bau Portal

Photoluminescence Study on Point Defects in SIMOX Buried SiO~2 Film

Seol, K. S. / Ieki, A. / Ohki, Y. / Nishikawa, H. / Tachimori, M.

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Photoluminescence Study on Point Defects in SIMOX Buried SiO~2 Film

Seol, K. S. / Ieki, A. / Ohki, Y. / Nishikawa, H. / Tachimori, M.

Photoluminescence Study on Point Defects in SIMOX Buried SiO~2 Film

Seol, K. S. / Ieki, A. / Ohki, Y. / Nishikawa, H. / Tachimori, M.

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Access via TIB

Check availability in my library

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Document information

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Document information

Title:

Photoluminescence Study on Point Defects in SIMOX Buried SiO~2 Film

Contributors:

Seol, K. S. (author) / Ieki, A. (author) / Ohki, Y. (author) / Nishikawa, H. (author) / Tachimori, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 1909-1914

Publication date:

1995-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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