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    Damage profiling of Ar^+ sputtered Si(100) surface by medium energy ion scattering spectroscopy

    New search for: Lee, J. C.
    New search for: Jeong, C. S.
    New search for: Kang, H. J.
    New search for: Kim, H. K.
    New search for: Moon, D. W.
    New search for: Feldman, L. C.
    New search for: Nishizawa, J.
    New search for: Van der Weg, W. F.

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    Damage profiling of Ar^+ sputtered Si(100) surface by medium energy ion scattering spectroscopy

    New search for: Lee, J. C.
    New search for: Jeong, C. S.
    New search for: Kang, H. J.
    New search for: Kim, H. K.
    New search for: Moon, D. W.
    New search for: Feldman, L. C.
    New search for: Nishizawa, J.
    New search for: Van der Weg, W. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Damage profiling of Ar^+ sputtered Si(100) surface by medium energy ion scattering spectroscopy

    New search for: Lee, J. C.
    New search for: Jeong, C. S.
    New search for: Kang, H. J.
    New search for: Kim, H. K.
    New search for: Moon, D. W.
    New search for: Feldman, L. C.
    New search for: Nishizawa, J.
    New search for: Van der Weg, W. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Damage profiling of Ar^+ sputtered Si(100) surface by medium energy ion scattering spectroscopy

    Contributors:

    Lee, J. C. (author) / Jeong, C. S. (author) / Kang, H. J. (author) / Kim, H. K. (author) / Moon, D. W. (author) / Feldman, L. C. / Nishizawa, J. / Van der Weg, W. F.

    Published in:

    A journal devoted to applied physics and chemistry of surfaces and interfaces ; 97-101

    APPLIED SURFACE SCIENCE ; 100/101

    Publication date:

    1996-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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