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Depth Profiling of Al Ion-Implantation Damage in SiC Crystals by Cathodoluminescence Spectroscopy
Depth Profiling of Al Ion-Implantation Damage in SiC Crystals by Cathodoluminescence Spectroscopy
Depth Profiling of Al Ion-Implantation Damage in SiC Crystals by Cathodoluminescence Spectroscopy
Mitani, T. (author) / Hattori, R. (author) / Yoshikawa, M. (author)
MATERIALS SCIENCE FORUM ; 600/603 ; 615-618
2009-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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