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    Annealing behavior of phosphorus in native oxide films on heavily phosphorus doped silicon

    New search for: Ying, W. B.
    New search for: Mizokawa, Y.
    New search for: Yu, Y. B.
    New search for: Kamiura, Y.
    New search for: Iida, M.
    New search for: Kawamoto, K.
    New search for: Feldman, L. C.
    New search for: Nishizawa, J.
    New search for: Van der Weg, W. F.

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    Annealing behavior of phosphorus in native oxide films on heavily phosphorus doped silicon

    New search for: Ying, W. B.
    New search for: Mizokawa, Y.
    New search for: Yu, Y. B.
    New search for: Kamiura, Y.
    New search for: Iida, M.
    New search for: Kawamoto, K.
    New search for: Feldman, L. C.
    New search for: Nishizawa, J.
    New search for: Van der Weg, W. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Annealing behavior of phosphorus in native oxide films on heavily phosphorus doped silicon

    New search for: Ying, W. B.
    New search for: Mizokawa, Y.
    New search for: Yu, Y. B.
    New search for: Kamiura, Y.
    New search for: Iida, M.
    New search for: Kawamoto, K.
    New search for: Feldman, L. C.
    New search for: Nishizawa, J.
    New search for: Van der Weg, W. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Annealing behavior of phosphorus in native oxide films on heavily phosphorus doped silicon

    Contributors:

    Ying, W. B. (author) / Mizokawa, Y. (author) / Yu, Y. B. (author) / Kamiura, Y. (author) / Iida, M. (author) / Kawamoto, K. (author) / Feldman, L. C. / Nishizawa, J. / Van der Weg, W. F.

    Published in:

    A journal devoted to applied physics and chemistry of surfaces and interfaces ; 556-560

    APPLIED SURFACE SCIENCE ; 100/101

    Publication date:

    1996-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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