Annealing behavior of phosphorus in native oxide films on heavily phosphorus doped silicon

Ying, W. B. / Mizokawa, Y. / Yu, Y. B. et al. | British Library Online Contents | 1996

The chemical composition changes of silicon and phosphorus in the process of native oxide formation of heavily phosphorus doped silicon

Ying, W. B. / Mizokawa, Y. / Kamiura, Y. et al. | British Library Online Contents | 2001

Phosphorus redistribution in the surface region of heavily phosphorus doped silicon

Mizokawa, Y. / Ying, W. B. / Yu, Y. B. et al. | British Library Online Contents | 1996

Phosphorus redistribution in the surface region of heavily phosphorus doped silicon

Mizokawa, Y. / Ying, W. B. / Yu, Y. B. et al. | British Library Online Contents | 1996

Oxygen precipitation in heavily phosphorus-doped silicon wafer annealed at high temperatures

Zeng, Y. / Yang, D. / Ma, X. et al. | British Library Online Contents | 2009