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Etching of polycrystalline diamond films by electron beam assisted plasma

Kobashi, K. / Miyauchi, S. / Miyata, K. / Nishimura, K. / Rocca, J. J.

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Etching of polycrystalline diamond films by electron beam assisted plasma

Kobashi, K. / Miyauchi, S. / Miyata, K. / Nishimura, K. / Rocca, J. J.

Etching of polycrystalline diamond films by electron beam assisted plasma

Kobashi, K. / Miyauchi, S. / Miyata, K. / Nishimura, K. / Rocca, J. J.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Etching of polycrystalline diamond films by electron beam assisted plasma

Contributors:

Kobashi, K. (author) / Miyauchi, S. (author) / Miyata, K. (author) / Nishimura, K. (author) / Rocca, J. J. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 2744-2748

Publication date:

1996-01-01

Size:

5 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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