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Modeling of silicon atomic-layer-epitaxy

Sugahara, S. / Hasunuma, E. / Imai, S. / Matsumura, M.

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Modeling of silicon atomic-layer-epitaxy

Sugahara, S. / Hasunuma, E. / Imai, S. / Matsumura, M.

Modeling of silicon atomic-layer-epitaxy

Sugahara, S. / Hasunuma, E. / Imai, S. / Matsumura, M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Modeling of silicon atomic-layer-epitaxy

Contributors:

Sugahara, S. (author) / Hasunuma, E. (author) / Imai, S. (author) / Matsumura, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 107 ; 161-171

Publication date:

1996-01-01

Size:

11 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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