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Chemical vapour deposition of silicon carbide by pyrolysis of methylchlorosilanes
Chemical vapour deposition of silicon carbide by pyrolysis of methylchlorosilanes
Chemical vapour deposition of silicon carbide by pyrolysis of methylchlorosilanes
Byung Jin Choi (author) / Dong Won Park (author) / Dai Ryong Kim (author)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 16 ; 33-36
1997-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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