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Surface engineering and microtribology for microelectromechanical systems
Surface engineering and microtribology for microelectromechanical systems
Surface engineering and microtribology for microelectromechanical systems
Komvopoulos, K. (author)
WEAR -LAUSANNE- ; 200 ; 305-327
1996-01-01
23 pages
Article (Journal)
English
DDC:
620.11292
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