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Ablation of submicron structures on metals and semiconductors by femtosecond UV-laser pulses
Ablation of submicron structures on metals and semiconductors by femtosecond UV-laser pulses
Ablation of submicron structures on metals and semiconductors by femtosecond UV-laser pulses
Simon, P. (author) / Ihlemann, J. (author)
APPLIED SURFACE SCIENCE ; 109/110 ; 25-29
1997-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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