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UV laser modifications and etching of polymer films (PMMA) below the ablation threshold

Bityurin, N. / Muraviov, S. / Alexandrov, A. / Malyshev, A.

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UV laser modifications and etching of polymer films (PMMA) below the ablation threshold

Bityurin, N. / Muraviov, S. / Alexandrov, A. / Malyshev, A.

UV laser modifications and etching of polymer films (PMMA) below the ablation threshold

Bityurin, N. / Muraviov, S. / Alexandrov, A. / Malyshev, A.

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Order at Subito €

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Document information

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Document information

Title:

UV laser modifications and etching of polymer films (PMMA) below the ablation threshold

Contributors:

Bityurin, N. (author) / Muraviov, S. (author) / Alexandrov, A. (author) / Malyshev, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 109/110 ; 270-274

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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