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Deep reactive ion etching of PMMA

Zhang, C. / Yang, C. / Ding, D.

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Deep reactive ion etching of PMMA

Zhang, C. / Yang, C. / Ding, D.

Deep reactive ion etching of PMMA

Zhang, C. / Yang, C. / Ding, D.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Deep reactive ion etching of PMMA

Contributors:

Zhang, C. (author) / Yang, C. (author) / Ding, D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 227 ; 139-143

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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