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A thermodynamic approach to chemical vapor deposition of boron nitride thin films from borazine
A thermodynamic approach to chemical vapor deposition of boron nitride thin films from borazine
A thermodynamic approach to chemical vapor deposition of boron nitride thin films from borazine
Kuznetsov, F. A. (author) / Golubenko, A. N. (author) / Kosinova, M. L. (author)
APPLIED SURFACE SCIENCE ; 113/114 ; 638-641
1997-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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