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A growth model for the carbonization of silicon surfaces

Cimalla, V. / Pezoldt, J. / Eichhorn, G.

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A growth model for the carbonization of silicon surfaces

Cimalla, V. / Pezoldt, J. / Eichhorn, G.

A growth model for the carbonization of silicon surfaces

Cimalla, V. / Pezoldt, J. / Eichhorn, G.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A growth model for the carbonization of silicon surfaces

Contributors:

Cimalla, V. (author) / Pezoldt, J. (author) / Eichhorn, G. (author) / Camassel, J. / Fricke, K. / Krozer, V. / Robert, J. L.

Published in:

High Temperature Electronics: Materials, Devices and Applications ; 199-202

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 46

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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