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Quantum chemical study of silicon oxide surface reaction with (poly)silane

Tachibana, A. / Yano, T.

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Quantum chemical study of silicon oxide surface reaction with (poly)silane

Tachibana, A. / Yano, T.

Quantum chemical study of silicon oxide surface reaction with (poly)silane

Tachibana, A. / Yano, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Quantum chemical study of silicon oxide surface reaction with (poly)silane

Contributors:

Tachibana, A. (author) / Yano, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 117/118 ; 61-66

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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