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Quantum chemical study on p-doping effect of silicon surface reaction with silane
Quantum chemical study on p-doping effect of silicon surface reaction with silane
Quantum chemical study on p-doping effect of silicon surface reaction with silane
Tachibana, A. (author) / Yano, T. (author)
APPLIED SURFACE SCIENCE ; 117/118 ; 47-53
1997-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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