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    Characterization of SiO~2/Si with a novel scanning capacitance microscope combined with an atomic force microscope

    New search for: Tomiye, H.
    New search for: Kawami, H.
    New search for: Yao, T.

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    Characterization of SiO~2/Si with a novel scanning capacitance microscope combined with an atomic force microscope

    New search for: Tomiye, H.
    New search for: Kawami, H.
    New search for: Yao, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of SiO~2/Si with a novel scanning capacitance microscope combined with an atomic force microscope

    New search for: Tomiye, H.
    New search for: Kawami, H.
    New search for: Yao, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Characterization of SiO~2/Si with a novel scanning capacitance microscope combined with an atomic force microscope

    Contributors:

    Tomiye, H. (author) / Kawami, H. (author) / Yao, T. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 117/118 ; 166-170

    Publication date:

    1997-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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