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    Formation mechanism of ultrathin WSiN barrier layer in a W/WN~x/Si system

    New search for: Nakajima, K.
    New search for: Akasaka, Y.
    New search for: Miyano, K.
    New search for: Takahashi, M.
    New search for: Suehiro, S.
    New search for: Suguro, K.

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    Formation mechanism of ultrathin WSiN barrier layer in a W/WN~x/Si system

    New search for: Nakajima, K.
    New search for: Akasaka, Y.
    New search for: Miyano, K.
    New search for: Takahashi, M.
    New search for: Suehiro, S.
    New search for: Suguro, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Formation mechanism of ultrathin WSiN barrier layer in a W/WN~x/Si system

    New search for: Nakajima, K.
    New search for: Akasaka, Y.
    New search for: Miyano, K.
    New search for: Takahashi, M.
    New search for: Suehiro, S.
    New search for: Suguro, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Formation mechanism of ultrathin WSiN barrier layer in a W/WN~x/Si system

    Contributors:

    Nakajima, K. (author) / Akasaka, Y. (author) / Miyano, K. (author) / Takahashi, M. (author) / Suehiro, S. (author) / Suguro, K. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 117/118 ; 312-316

    Publication date:

    1997-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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