Heteroepitaxy of GaN and related materials with a novel two-flow MOVPE horizontal reactor: Fid-Bau Portal

Heteroepitaxy of GaN and related materials with a novel two-flow MOVPE horizontal reactor

Nishida, K. / Uchida, K. / Kondo, M. / Kukimoto, H. / Munekata, H.

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Heteroepitaxy of GaN and related materials with a novel two-flow MOVPE horizontal reactor

Nishida, K. / Uchida, K. / Kondo, M. / Kukimoto, H. / Munekata, H.

Heteroepitaxy of GaN and related materials with a novel two-flow MOVPE horizontal reactor

Nishida, K. / Uchida, K. / Kondo, M. / Kukimoto, H. / Munekata, H.

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Check availability in my library

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Document information

Title:

Heteroepitaxy of GaN and related materials with a novel two-flow MOVPE horizontal reactor

Contributors:

Nishida, K. (author) / Uchida, K. (author) / Kondo, M. (author) / Kukimoto, H. (author) / Munekata, H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 117/118 ; 530-535

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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