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Numerical study of AlGaN growth by MOVPE in an AIX200 RF horizontal reactor
Numerical study of AlGaN growth by MOVPE in an AIX200 RF horizontal reactor
Numerical study of AlGaN growth by MOVPE in an AIX200 RF horizontal reactor
Mesic, E. (author) / Mukinovic, M. (author) / Brenner, G. (author)
COMPUTATIONAL MATERIALS SCIENCE ; 31 ; 42-56
2004-01-01
15 pages
Article (Journal)
English
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